| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive cloth which secures flatness of a polished object and improves polishing efficiency. <P>SOLUTION: An abrasive pad 1 has a polyurethane sheet 2 made of polyurethane resin. The polyurethane sheet 2 is formed with large cells 3 of approximately triangular cross section rounded along a thickness direction. The cell 3 has polyurethane resin existing in a partition wall shape, and micro foams 4 are formed in the polyurethane resin. Part of micro foams 4 is internally provided with micro particles 5 added in manufacturing the polyurethane sheet 2, and the micro particles 5 are detachable. Micro foams uniformly storing a polishing fluid containing abrasive particles are formed in a polishing surface P by eliminating the micro particles 5 positioned on the polishing surface P, by dummy polishing or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
