发明名称 Dynamic random access memory structure
摘要 A dynamic random access memory structure. The structure includes a substrate having protruding sections and recessed sections, in which the protruding sections have sidewalls and a substrate surface is located between the protruding sections and the recessed sections. A gate oxide layer is formed on the sidewalls of the protruding sections and on the surfaces between the protruding sections and the recessed sections. A doped region is formed near the bottom of each protruding section, and these doped regions serve as buried bit lines. A channel region is formed in the protruding section and a gate electrode is formed on each side of the channel region. A storage electrode is connected to the other end of the protruding section and a word line is connected to the gate electrode. The word line and the buried bit line are perpendicular to each other.
申请公布号 US6204528(B1) 申请公布日期 2001.03.20
申请号 US20000478328 申请日期 2000.01.06
申请人 UNITED MICROELECTRONICS CORP. 发明人 LEE ROBIN
分类号 H01L21/8242;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L21/8242
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