| 摘要 |
<p>A method of creating a codoped layer (18) includes creating a first layer (14) having a first dopant and at least one other layer (16) have another dopant, then interdiffusing the dopant to create a substantially homogeneous codoped layer. More than one dopant may be deposited in a single layer. The creating conditions may be optimized for each layer (14, 16). Further, when the creation of a layer includes sequential deposition and consolidation, conditions for each process may be optimized within the layer creation. While at least two layers (14, 16) are formed, the interdiffusion substantially eliminates any stratification or layer structure.</p> |
