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发明名称
BAKE APPARATUS
摘要
申请公布号
KR20060030444(A)
申请公布日期
2006.04.10
申请号
KR20040079295
申请日期
2004.10.05
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, DO GYUN
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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