| 摘要 |
An ion implanter and a cell oven assembly are provided to remove remainders of a convertible material from a housing through an opening which is formed around a periphery portion of an inlet or an outlet. A convertible material is heated in a housing(210), so that the housing is filled with a gas of the convertible material. The housing is provided with an inlet(220) for receiving conductive impurity ion beam, and an outlet(230) for discharging the conductive impurity ion beam. An opening port(240) is formed around at least one of the outlet and inlet to open a periphery portion of the inlet or outlet when removing residues from the housing.
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