| 摘要 |
A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substrate 11 having a plurality of electrodes ( 16 a, 16 b, 16 c, 16 d and 16 e) formed on a surface of the electrode substrate; a silicon membrane 13 having a counter electrode opposed to the plurality of electrodes formed on the electrode substrate 11 ; a reflection section 15 provided on the side of the silicon membrane 13 opposite the counter electrode; and a support plate 19 integrally bonded to the electrode substrate 11 for restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane 13 , in which a plurality of layers of wiring patterns ( 11 a, 11 b, 11 c, 11 d and 11 e) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate 11.
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