Chemically amplified resist composition

摘要

(A) a salt represented by the formula (I): A<+->O3S G Q<1>```(I) wherein Q<1> represents a C1-C8 perfluoroalkyl group, and A<+> represents at least one organic cation selected from a cation represented by the formula (Ia): wherein P<1>, P<2> and P<3> each independently represent a C1-C30 alkyl group which may be substituted with at least one selected from a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from a hydroxyl group and a C1-C12 alkoxy group, a cation represented by the formula (Ib): wherein P<4> and P<5> each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group, and a cation represented by the formula (Ic): where P<10-21> each represents a hydrogen atom, a hydroxyl group, a C1-C12 alkyl or alkoxy group, B is sulphur or oxygen and m= 0 or 1 (B) a salt of formula (II) where R<22> is a C1-C30 hydrocarbon group which may be substituted, and at least on -CH2- in the hydrocarbon group may be substituted by -CO- or -O- and Q<3> and Q<4> each represents a fluorine atom or a C1-C6 perfluoroalkyl group, and A'<+> represents an organic cation represented by formula (IIa): where P<6> and P<7> are bonded to form a C3-C12 alkyl group or a C3-C12 cycloalkyl group, or P<6> and P<7> are bonded to form a C3-C12 divalent acyclic hydrocarbon group which forms a ring together with the adjacent S<+>, and at least one -CH2- in the divalent hydrocarbon group may be substituted with a -CO-, -O-or -S-, P<8> is a hydrogen atom, P<9> is C1-C12 alkyl, a C3-C12 cycloalkyl or aromatic group which may be substituted, or P<8> is hydrogen, or P<8> and P<9> are bonded to form a divalent acyclic hydrocarbon group which forms a 2-oxocycloalkyl group together with the adjacent -CHCO-, and at least one -CH2- in the divalent acyclic hydrocarbon group may be replaced with -CO-, -O-, or -S-, and (C) a resin which contains a structural unit having an acid-labile group and which itself is insoluble or poorly soluble in an aqueous alkali solution but becomes soluble in an aqueous alkali solution by the action of an acid.