METHOD FOR MANUFACTURING FUNCTIONAL FILM FORMING BASE
摘要
<p>Provided is a method for manufacturing a functional film forming base having a spin film formation step. The spin film formation step includes: a step of arranging a weir on the base end portion; a step of supplying a coating liquid used to form a functional film on a base which is in a still state or rotating at a rotation speed lower than 10 rpm; and a step for spreading the coating liquid by the centrifugal force of the spin rotation.</p>