DETECTION SENSOR, VIBRATOR

摘要

A detection sensor and a vibrator in which high sensitivity can be attained. Such a system as a piezoelectric layer or a drive electrode is not provided on the surface of a vibrator (30) but the vibrator (30) is driven by an actuator (40) provided separately from the vibrator (30) is employed. The actuator (40) is cantilever type and provided in the vicinity of the fixed end (30a) of the vibrator (30). Vibration of the actuator (40) is transmitted to the vibrator (30) through a coupling beam (70). Obstruction of vibration of the vibrator (30) due to a piezoelectric layer or a drive electrode is suppressed and the Q-value of the vibrator (30) is enhanced thus obtaining a detection sensor of higher sensitivity. In case of an equivalent sensitivity, a remarkably compact detection sensor (10) can be attained.