TRANSFER METHOD AND TRANSFER APPARATUS

摘要

Each substrate holder holds a substrate to be laminated, and a pair of substrate holders are placed one over another by being aligned by an aligning section. While the pair of the substrate holders are being transferred from the aligning section to a pressurizing/heating section, whether there is a possibility of having a positional shift of a threshold value or more generated between the substrates is judged. When it is judged that there is the possibility, the pair of substrate holders are transferred to a region different from the pressurizing/heating section. The possibility may be judged by acceleration of the substrate holders or by acceleration of the transfer section transferring the substrate holders. Furthermore, the possibility may be judged by relative positions of the pair of substrate holders or by relative positions of the transfer section, which is transferring the pair of substrate holders, to one of the pair of the substrate holders.