| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method improved in measurement accuracy by reducing an influence of a ghost image. SOLUTION: This specimen shape measuring method by an optical cutting method has: a first step (S101) of projecting sheet light for performing optical cutting onto the specimen; a second step (S102) of imaging the surface of the specimen onto which the sheet light is projected in the first step; a third step (S103) of detecting a brightness peak position by scanning the image imaged in the second step in the elongation direction of the sheet light and in the crossing direction therewith; and a fourth step (S104) of specifying an image formed by multiple reflection of the sheet light on the image from a plurality of peak positions when the plurality of peak positions are detected. COPYRIGHT: (C)2009,JPO&INPIT
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