发明名称 SEALING STRUCTURE FOR DRYING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent emission of hot air inside a drying chamber to outside and to improve thermal efficiency during drying by achieving a structure capable of transferring workpieces by transfer rods provided inside the workpiece drying chamber and sealing hole parts formed in the workpiece drying chamber to perform the transfer in a drying device. SOLUTION: This sealing structure for the drying device is provided with the workpiece drying chamber for drying workpieces stored in the sealed chamber while transferring them; the transfer rods inserted from a partition plate for closing the workpiece drying chamber to inside of the chamber and reciprocated along guide holes formed on the partition plate while supporting workpieces; slide plates provided overlapped with the guide holes and slid together with the transfer rods penetrated through the slide plates; and driven plates located on both sides of the slide plates and driven to cover opening parts of the guide holes opened along with sliding operation of the slide plates. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009019820(A) 申请公布日期 2009.01.29
申请号 JP20070182723 申请日期 2007.07.12
申请人 MAX TEC:KK 发明人 SATO YOJI
分类号 F27B9/20;F26B15/00;F27D3/12;H01L21/304 主分类号 F27B9/20
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