| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium which enables formation of a mask having a high aspect ratio and formation of a fine pattern by dry etching of a magnetic recording layer. SOLUTION: The manufacturing method of the magnetic recording medium has a process for sequentially disposing at least the magnetic recording layer, an underlayer, and a porous film on a substrate, a process for growing an oxide containing an element which constitutes the underlayer along holes of the porous film from the lower part of the holes, a process for removing the porous film to obtain the underlayer and protrusions composed of the oxide on the substrate and a process for dry-etching the magnetic recording layer through the underlayer using the protrusions composed of the oxide as a mask. COPYRIGHT: (C)2009,JPO&INPIT
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