| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance acceleration sensor of a relatively simple structure at a low manufacturing cost. SOLUTION: Split conductors 14a and 14b are made an electret so as to constitute a pair of capacitors C1 and C2 between the split conductors 14a and 14b and a metal fixed electrode 12. The split conductors 14a and 14b are oscillated in the reverse direction B by the moment of a mass block body 16 when an acceleration A is applied in the direction parallel to the surface of an oscillating body 14, for detecting the acceleration based on the difference in output between the capacitors C1 and C2 which accompanies the oscillation. |
