发明名称 INDIUM OXOALKOXIDES FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS
摘要 FIELD: chemistry.SUBSTANCE: invention relates to halogen-containing indium oxoalkoxide of general formula InOX(OR)(R'CH(O)COOR")(HOR)(HNR"'), wherein X denotes fluorine, chlorine, bromine and/or iodine, R denotes an alkyl with 1-15 carbon atoms, R' denotes an alkyl with 1-15 carbon atoms, R" denotes an alkyl with 1-15 carbon atoms , R"' denotes an alkyl with 1-15 carbon atoms, x denotes a number from 1 to 10 and y denotes a number from 1 to 10. The invention also discloses a method producing indium oxoalkoxides and use thereof.EFFECT: invention enables to obtain indium oxoalkoxide which is used to form indium oxide-containing layers, having improved operating electrical properties.10 cl, 1 dwg, 1 tbl, 3 ex
申请公布号 RU2570201(C9) 申请公布日期 2016.07.20
申请号 RU20130107450 申请日期 2011.07.07
申请人 EVONIK DEGUSSA GMBKH 发明人 SHTAJGER YURGEN;FAM DUJ VU;TIM KHAJKO;MERKULOV ALEKSEJ;KHOPPE ARNE
分类号 C07F5/00;C23C18/12 主分类号 C07F5/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利