| 摘要 |
<p>PURPOSE:To provide a substrate processing device, where a substrate and a circuit pattern formed out its surface are protected against damage or a substrate is prevented from getting out of position when the substrate on a mounting table is lifted up with a substrate support pin, and a heating process can be improved in flexibility. CONSTITUTION:Through-holes 5 are provided to a hot plate 4, and a substrate support pin 6 is arranged in each through-hole 5. The lower end of the substrate support pin 6 is fixed to a connecting guide 7, and the connecting guide 7 is joined to a belt 8. The belt 8 is wound on a pulley 10 fitted to a stepping motor 9 and a pulley 11 located above the pulley 10, and the substrate support pins 6 are made to move up or down in accordance with the rotation of the stepping motor 9. The stepping motor 9 is controlled by a control device 12 to start, stop, or be regulated in rotary speed.</p> |
