| 摘要 |
PURPOSE:To simplify a maintenance thereby to simplify the structure of the disposing position of a laser tube, to reduce the weight and to improve the reliability of the tube by connecting the output of a matching circuit in a power source which includes a high frequency power source to the laser tube by a coaxial cable. CONSTITUTION:A high frequency power source 1 is disposed in a power source 5, and the output of the power source 5 is supplied through a coaxial cable 3 to a laser tube 4 in a laser output unit 6. The output voltage of the power source 1 is stepped up by a matching circuit 2, and applied through a cable 3 to the electrodes 43a, 43b of the tube 4. Thus, a high frequency discharge is generated in the interior 42 of a quartz glass tube 41, oxygen gas in the interior 42 is excited by the glow discharge to irradiate a light of a predetermined wavelength. This light is resonated by two reflecting mirrors provided in parallel at both sides of the tube 4, and partly produced as a laser output. |
