发明名称 System for selective laser assisted plating
摘要 A method directed to a system for splitting, imaging and focusing a pulsing laser beam, such as from an excimer laser, onto a workpiece to improve the subsequent metal plating of such workpiece. A preferred technique of laser assisted plating is a system for laser ablating a plurality of contact areas on electrical terminals, where the areas are covered by ablatable resist. The preferred system comprises a carrier strip having a plurality of electrical terminals mounted thereon; a pulsed laser for directing radiation at the carrier strip; a hologram mounted in the radiation path between the laser and the carrier strip for splitting the radiation from the laser into a plurality of radiation beams directed towards the plurality of contact areas; and mechanism for synchronizing the movement of the carrier strip with the pulsing of the laser so that a respective one of the plurality of outgoing beams ablates the resist over a respective one of the contacts as the contact areas move past the hologram.
申请公布号 US4964698(A) 申请公布日期 1990.10.23
申请号 US19890411355 申请日期 1989.09.22
申请人 AMP INCORPORATED 发明人 ROWLETTE, JOHN R.
分类号 C23C18/14;B23K26/067;C25D5/02;G02B5/32;G02B27/10;G03F7/20 主分类号 C23C18/14
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