MANUFACTURE OF MULTILAYER WIRING SEMICONDUCTOR DEVICE,申请号JP19900284835-传众专利搜索

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发明名称	MANUFACTURE OF MULTILAYER WIRING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH04159753(A)	申请公布日期	1992.06.02
申请号	JP19900284835	申请日期	1990.10.23
申请人	NEC CORP	发明人	MIHARA SEIICHIRO
分类号	H01L21/3205;H01L21/768	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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