| 摘要 |
PURPOSE:To achieve the automation of inspection by facilitating mechanical scanning and to perform highly accurate flaw detection without being affected by noise by transmitting laser beam through an optical fiber and an image fiber. CONSTITUTION:Ultrasonic waves 6 are oscillated from the surface of a material to be inspected receiving the irradiation with a laser pulse 19. A part of ultrasonic waves 6 impinge against a flaw 7 to be reflected and reflected ultrasonic waves 8 are generated to vibrate the surface of the material 4 to be inspected. The laser beam 21 oscillated from a laser oscillator 11 is divided into two directions through a lens 12b and a beam splitter 13. One laser beam 22 is reflected from a mirror 27 through a mirror 14 and the beam splitter 13 to be entered to an image fiber 28. The other divided beam 23 is converged to the surface 20 of the material 4 to be inspected and the reflected laser beam 23 from the surface 20 is converged through the beam splitter 13 and a lens 15 and reflected by the mirror 27 to be entered to the image fiber 28. By this method, the reflected ultrasonic waves 8 can be detected. |
