摘要 |
PURPOSE:To provide equipment coated with a Ti-Al-N film excellent in electric insulation, cutting property, exfoliation resistance, and abrasion resistance, etc. CONSTITUTION:This is equipment equipped with a film of Ti-Al-N composition where the ratio of the numbers of atoms between titanium and aluminum is Ti/AI=10/90-60/40. The quantity of nitrogen is enough for titanium and aluminum to combine with nitrogen and form TiN and AlN, respectively, and the ratio is enough for it. The film of the composition is given by sputtering method, etc. Hereby, when it is used as a dental root tube electrode, the length of the root can be measured more accurately as compared with before. |