| 摘要 |
PURPOSE:To prevent the emission inferiority of a nozzle by reducing the amount of the meniscus drawn into the nozzle and increasing a printing speed by forming a nozzle plate from a resin material mixed with a fibrous substance or whisker composed of metal oxide having nozzle orifices and forming a passage partitioned into a large number of orifices by the mixed fibrous substance or whisker in each of the nozzle orifices. CONSTITUTION:A nozzle plate 11 is composed of a resin material 10 mixed with a fibrous substance 5 composed of glass, carbon or metal oxide such as TiO2 and formed into a desired dimensional shape by 2 injection molding or press molding. Next, a mask 12 is arranged between the resin material 10 and an excimer laser and the resin material 10 is irradiated with excimer laser beam 13. Therefore, a nozzle orifice 14 is formed to the resin material 10 and a passage 18 partitioned into a large number of orifices by the fibrous substance 15 is formed in the nozzle orifice 4. Therefore, the amount of a meniscus can be reduced by partitioning the nozzle orifice 14 into a large number of passages and, as a result, a printing speed can be increased and the generation of emission inferiority can be prevented. |
