| 摘要 |
PROBLEM TO BE SOLVED: To provide a control valve by an ultrasonic motor for preventing a vibration propagation to a cylinder of a control valve body, connected to a vibrator by effectively operating a vibration generated at the vibrator as a rotary force. SOLUTION: In a flow control valve, utilizing an ultrasonic motor having a rotor 3 rotating by a vibration of a vibrator 10 via a driver 4 and a valve disc 5 changing in its opening of a valve port 8 by a rotation of the rotor 3 with suitable urging means in a control valve body 1 formed in a sealed structure through welding or the like with the vibrator 10, a cylinder 7 and a body 9, the vibrator 10 is formed of two vibrator 10a formed by connecting a piezoelectric element 2a or an electrostatictive element to the upper surface of an elastic element 6a, and a vibrator 10b formed by connecting a piezoelectric element 2b or an electrostrictive element to the lower surface of an elastic element 6b made into a recess shape. |
