| 摘要 |
PROBLEM TO BE SOLVED: To provide a dense SiC heater with resistivity suitable for electric current heat generation, small resistivity with less variations during manufacturing, with dense and excellent durability. SOLUTION: The SiC heat generating material is composed of the heating element and the non-heating element. The heating element is composed of SiC sintered material containing nitrogen of more than 0.1 wt.% and boron of 0.1-0.5 wt.%, having resistivity of 0.05-5 ohm.cm, and having open porosity of less than 15%. The non-heating element is composed of SiC sintered material containing Si, and having resistivity of less than 0.05 ohm.cm. The heating element of the SiC sintered material is manufactured by heating the formed body up to 2100-2300 deg.C under the nitrogen gas atmosphere or inert gas atmosphere containing nitrogen gas. The formed body is formed by mixing of SiC powder having average diameter of less than 5 micrometer and sintering aids. |
