WORKING METHOD OF INSULATING FILM,申请号JP19940213161-传众专利搜索

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发明名称	WORKING METHOD OF INSULATING FILM
摘要
申请公布号	JPH0855857(A)	申请公布日期	1996.02.27
申请号	JP19940213161	申请日期	1994.08.15
申请人	YAMAHA CORP	发明人	TAWARA TAKASHI
分类号	H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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