| 摘要 |
PURPOSE: To keep natural appearance without showing chromatic color or transmitting color in appearance by forming films of a 1st to 6th layer, which have respectively a specific component and thickness, successively on a glass plate. CONSTITUTION: In a sputtering device, two cathodes using respectively metallic Sn and metallic Ag as a target are installed in a sputtering chamber, a glass substrate 10 of a colorless 'and transparent float glass is transported to the sputtering chamber after evacuation and the pressure of the sputtering chamber is controlled to 0.3Pa by introducing Ar gas and O2 gas. A tin oxide film 11 having 36.2nm film thickness is formed as the 1st layer by supplying electric powder to the cathode of the Sn target to discharge and passing the glass substrate 10 on the target, the 2nd layer of a Ag film 12 having 8.0nm film thickness is formed by discharging to the Ag target and passing thereon, the 3rd layer of a tin oxide film 13 having 73.3nm film thickness on the Sn target, the 4th layer of a Ag film 14 having 73.3nm film thickness on the Ag target, the 5th layer of a tin oxide film 15 on the Sn target and if necessary, a protective film as the 6th layer are formed. |
