发明名称 HIGH-FREQUENCY INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要 <p>A high-frequency integrated circuit device which has a field effect transistor in a first area on the main surface of a semi-insulating semiconductor substrate and strip conductors in a second area on the main surface of the substrate, wherein the strip conductors are arranged in grooves provided in the second area on the main surface of the semi-insulating semiconductor substrate so as to reduce the device size while maintaining sufficient mechanical strenght.</p>
申请公布号 WO1998012751(P1) 申请公布日期 1998.03.26
申请号 JP1996002729 申请日期 1996.09.20
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