发明名称 |
Apparatus for measuring physical properties of micro area |
摘要 |
<p>An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2. <IMAGE></p> |
申请公布号 |
EP0648999(B1) |
申请公布日期 |
1999.02.17 |
申请号 |
EP19940307222 |
申请日期 |
1994.10.03 |
申请人 |
HITACHI, LTD. |
发明人 |
HOSOKI, SHIGEYUKI;HASEGAWA, TSUYOSHI;KOHNO, MAKIKO |
分类号 |
G01B7/34;G01N27/00;G01Q30/10;G01Q30/12;G01Q30/16;G01R33/56;(IPC1-7):G01B7/34 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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