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发明名称
摘要
申请公布号	JP3404928(B2)	申请公布日期	2003.05.12
申请号	JP19940272565	申请日期	1994.11.07
申请人		发明人
分类号	H01L21/20;H01L21/02;H01L21/268;H01L21/336;H01L27/12;H01L29/786;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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