| 摘要 |
An apparatus for generating an atmospheric pressure plasma is provided to prevent a first electrode assembly from being operated as an antenna and to generate stably plasma by installing at least one capacitor at a conductor of a first electrode assembly applied with an RF power source. An apparatus for generating an atmospheric pressure plasma includes a first electrode, an RF power source, a second electrode, and a gas supply member. The first electrode is formed like a rod type structure. The RF power source is used for supplying an RF power to the first electrode through a matching circuit. The second electrode(15) is spaced apart from the first electrode along a length direction to form a space for discharge. The gas supply member(10,20) has a path for supplying a process gas to the discharge space. The gas supply member is used for fixing the first and the second electrodes. The path of the gas supply member includes a buffer space, a mixing space connected with the discharge space and a plurality of orifices. The plurality of orifices are formed in the buffer space toward an inner wall of the mixing space. The apparatus further includes at least one capacitor connected to an end portion of the first electrode.
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