| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film element and a method of manufacturing the same capable of forming a lithium potassium sodium niobate thin film of high quality and having high film density by an aerosol deposition method. <P>SOLUTION: In a piezoelectric thin film element 101 having a structure in which a lower electrode 103, a piezoelectric thin film 104, and an upper electrode 105 are arranged in this order on a substrate 102, wherein the piezoelectric thin film 104 is formed by the aerosol deposition method and the main component is a polycrystal having an alkali niobate base perovskite structure expressed by (Na<SB>x</SB>K<SB>y</SB>Li<SB>z</SB>) NbO<SB>3</SB>(0<x<1, 0<y<1, 0≤z<1, x+y+z=1), the film density of the piezoelectric thin film 104 is 95% or higher. <P>COPYRIGHT: (C)2008,JPO&INPIT |
