| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple method for knowing an amount of radical irradiation onto a surface of a test object. SOLUTION: The accelerated exposure degradation test method includes a step of accelerating the degradation of the test piece surface by irradiating the test piece with radicals, and a step of irradiating a reference piece, which changes according to the amount of irradiation of radicals, in the same condition onto the test piece, wherein the associated relation between the change in the reference piece and the amount of radical irradiation is predetermined. COPYRIGHT: (C)2009,JPO&INPIT
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