| 摘要 |
PROBLEM TO BE SOLVED: To fix surely a sample in liquid, relative to a scanning probe microscope. SOLUTION: In this scanning probe microscope, a probe 3 and a sample 5 are arranged close oppositely in liquid in a sample chamber 9', and a relative position between the probe 3 and the sample 5 is changed, and image information of a sample surface is acquired based on interaction between the probe 3 and the sample 5. In the microscope, a plate 20 on which holes 21A, 21B, 21C, etc., are bored is installed in the sample chamber 9' so that the inside of the sample chamber 9' is divided in two, upper and lower parts, by the plate 20. The sample 5 is set on the upper surface of the plate 20 so as to close the holes 21A, 21B, 21C, etc., so that liquid flows along the upper surface and the lower surface of the plate 20 respectively, and that a flow rate of liquid flowing along the lower surface of the plate 20 is higher than a flow rate of liquid flowing along the upper surface. COPYRIGHT: (C)2009,JPO&INPIT
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