METHOD OF MANUFACTURING INTERMEDIATE MATERIAL OF ELECTRONIC ELEMENT, ELECTRONIC ELEMENT MANUFACTURING METHOD, INTERMEDIATE MATERIAL OF ELECTRONIC ELEMENT AND ELECTRONIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To suppress occurrence of unintentional inter-layer exfoliation in a manufacturing process.SOLUTION: A method of manufacturing an intermediate material of an electronic element contains a step of preparing a glass substrate 10, a step of forming an exfoliation preventing film 11 which is disposed on at least one surface of the glass substrate 10 and contains silicon at at least a part thereof, a step of forming a first polyimide film 12 which is disposed on the exfoliation preventing film 11 and contains fluorine at at least a part thereof, and a step of forming a second inorganic film 13 which is disposed on the first polyimide film 12 and contains silicon at at least a part thereof.SELECTED DRAWING: Figure 11