RESONANCE DRIVEN ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a resonance driven actuator for driving a moving part connected to a moving part by means of resonance capable of increasing the magnitude by the resonance driven actuator and capable of precisely controlling the vibration according to the magnitude.SOLUTION: The resonance driven actuator includes: a moving part 1 having a rotary shaft 7; a pair of torsion beams 2 and 3 which are disposed at symmetrical positions with respect to the moving part 1 extending along the rotary shaft 7; a pair of drive parts 5a, 5b and a pair of drive parts 6a, 6b which are dispose symmetrical with respect to the torsion beams 2 and 3; plural driver units 8 which are attached to the drive parts 5a and 5b and the drive parts 6a and 6b respectively; and a control circuit 15 that controls each of the driver unit 8. The control circuit 15 controls to apply a basic signal 16 and a correction signal 17 as a higher frequency of the basic signal 16 to the driver unit 8.SELECTED DRAWING: Figure 1