| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film removing method capable of easily and accurately removing an unnecessary coating film from a cylindrical substrate lower outer peripheral surface by an immersion coating method.SOLUTION: A coating film removing method for removing an unnecessary coating film from a cylindrical substrate lower outer peripheral surface by an immersion coating method includes the solvent supply step of supplying a solvent into a substrate through an opening for discharging the solvent, the outer peripheral surface coating film removing member abutting step of abutting an outer peripheral surface coating film removing member on the upper end to the lower end of the coating film of the removed part of the outer peripheral surface of the substrate by using the outer peripheral surface coating film removing member for removing the coating film of the removed part of the outer peripheral surface of the substrate as the coating film removing member, and the outer peripheral surface coating film removing step of relatively rotating, while abutting the outer peripheral surface coating film removing member on the upper end to the lower end of the coating film of the removed part of the outer peripheral surface of the substrate and while supplying the solvent supplied into the substrate to subsequently flow to the lower end of the substrate to the abutted part of the coating film of the removed part of the outer peripheral surface and the outer peripheral surface coating film removing member, the substrate and the outer peripheral surface coating film removing member to rub each other, and removing the coating film of the removed part of the outer peripheral surface.SELECTED DRAWING: Figure 1 |
