| 摘要 |
PURPOSE:To extend the service life of heater, by a method wherein the vacuum deposition within a fixed time is made possible by providing the procedure of its self-control of applied electric energy against the variation of resistance value of heater. CONSTITUTION:A vacuum deposition heater 6 is provided in a vacuum deposition tank 5, which is connected to a heater circuit via applied power source contacts 7 and 8. The heater 6 is applied with power by turning on a relay contact 21 when operated and power regulation is carried out with a variable resistance 16. Then, relay contact 22 is turned ON and the power for vacuum deposition is applied to the heater 6 according to the reset value of variable resistance 23. However, when the heater 6 is deteriorated, the vacuum deposition within a fixed time can not be carried out by the reset electric energy of variable resistance 23. Therefore, the power is increased against the increase of resistance value of heater 6 with the variable resistance 16 and the vacuum deposition within a fixed time is carried out. |
