发明名称 |
Device for generating negative-ion beams by alkaline metal ion sputtering |
摘要 |
A negative-ion source comprising means for discharging alkaline metal for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which can serve as an extraction electrode for extracting said alkaline metal ion particles and a target bombarded with said alkaline metal ion particles and which provides with a hold for holding negative-ion seed material in the portion bombarded with said alkaline metal ion particles and an aperture for letting out negative-ion particles; and a negative-ion extraction electrode for said negative-ion particles. The present negative-ion source has an improved ion current efficiency and is compact size.
|
申请公布号 |
US4563610(A) |
申请公布日期 |
1986.01.07 |
申请号 |
US19830477971 |
申请日期 |
1983.03.23 |
申请人 |
NISSIN-HIGH VOLTAGE CO., LTD. |
发明人 |
TAKAGI, TOSHINORI;ISHIKAWA, JUNZO;MATSUDA, KOJI |
分类号 |
C23C14/48;H01J27/02;H01J27/20;H01J37/08;(IPC1-7):H01J27/22;H01J49/14;H05H1/24 |
主分类号 |
C23C14/48 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|