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发明名称
MANUFACTURING DEVICE FOR SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH03163846(A)
申请公布日期
1991.07.15
申请号
JP19890303927
申请日期
1989.11.22
申请人
FUJITSU TOHOKU ELECTRON:KK
发明人
NAKAMURA MASARU
分类号
H01L21/66;H01L21/203
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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