NEGATIVE IMAGE FORMING METHOD OF POLYIMIDE

摘要

PURPOSE: To provide an improved method for forming a negative image of a photosensitive polyimide having an improved wall surface angle on a substrate. CONSTITUTION: This forming method of the negative image of the polyimide includes (a) a process for coating the substrate with a coating film containing a polyamine acid ester and a photoinitiator, (b) a process for exposing the coating film corresponding to an image with radiation to make a polyamine acid ester insoluble corresponding to the image, (c) a process for developing the image, (d) a process for allowing the coating film to contact with a base and (e) a process for making the polyamine acid ester to an imide by heating the coating film.