| 摘要 |
PURPOSE: To provide a manufacturing method of a thin film solar cell having rear electrode structure wherein the adhesion to a thin film semiconductor layer and the high reflectivity are compatible. CONSTITUTION: A transparent electrode layer 21, a thin film semiconductor layer 23 and a rear electrode layer 11 are laminated in order on an insulating transparent substrate 5a, and a thin film solar cell is manufactured. In this case, after a first transparent conducting metal compound layer 13 is laminated on the laminated thin film semiconductor layer 23, the substrate 5a on which the first transparent conducting metal compound layer 13 is laminated is moved in a plurality of adjacent plasma regions P2 , P2a , Pa which are formed in a reaction chamber 3 by using transparent conducting metal compound and metal, toward the metal side from the transparent conducting metal compound side. Thereby the rear electrode layer 11 composed of the first transparent conducting metal compound layer 13, a second transparent conducting metal oxide layer 15 and a metal layer 17 is laminated on the thin film semiconductor layer 23. As the transparent conducting metal compound, ITO, SnO, ZnO and CdS are quoted. As the metal, Ag or Al is quoted. |
