| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a detector for detecting all glass board or wafers stored in a cassette at a time without a detection miss. SOLUTION: A robot is provided opposite to a cassette for storing a wafer (W). A detection member 5 mounted on an upper face of a hand arm of a robot includes a light emitting element 6, a half mirror 7 and a condenser lens 8 on an optical axis of the light emitting element 6, and a light receiving element 9 at a position where the optical axis is separated from the half mirror 7. The condenser lens 8 is provided in such a way that an edge face (P) of the wafer (W) on the detection member (5) side is conjugate with the position of the light emitting element 6. Whether the wafer (W) is mounted or not and the position of the wafer (W) are detected during one reciprocation of the robot from a lower end to an upper end of the cassette, and the result is transmitted in advance as information to the following step.</p> |
