摘要 |
PROBLEM TO BE SOLVED: To prevent the peeling of a surface metal in a high temperature heating by flame spraying (plasma) a metal material inactive to an organic compound to the inside surface of a phosphor electrode nipped by two end cap electrodes with an equal space. SOLUTION: This mass spectrometer is formed of a column 1 for separating a sample, upper and lower end cap electrodes 2, 3 for colliding a filament 6 for generating an electron for ionizing the sample flowing out of the column 1 with the element, and forming a three dimensional quadrupole field, thereby ionizing the sample and accumulating the ion, and a ring electrode 4 nipped by the end cap electrodes 2, 3 with an equal space. The ion of an organic compound and Mo, Au, Cr, Ta or W which is an inert metal having a neutral molecule causing no catalytic reaction are thermally sprayed (plasma) to the inside surface of the ring electrode 4 in a thickness of severalμm-several hundredsμm, so that the ion and neutral molecule do not cause a catalytic reaction of absorption-decomposition-desorption-absorption by the covalent bond with the dangling bond of the metal surface. |