| 摘要 |
PROBLEM TO BE SOLVED: To improve secondary electron control effect and heighten a degree of freedom of design in a case where a detection or the like is arranged in front of a target by constituting a magnetic field generation means of a plurality of magnets arranged in rear of the target. SOLUTION: Magnets 10, 11 are in the form of a square column having length equal to the longitudinal size of a target holder 1 and disposed on both the ends of the width direction of the target holder 1 respectively. The magnets 10, 11 are magnetized in the direction orthogonal to the incident face 2a of an ion beam of a target 2. A magnetic field generation means 12 constituted by the magnets 10, 11 is housed in a vacuum vessel together with the target holder 1 and the target 2. When the magnetic field generation means 12 is disposed rearward of the target 2, a magnetic field acting on secondary electrons is strengthened and secondary electron control effect can be heightened because the distance between the magnets 10, 12 constituting the magnetic field generation means 12 can be shortened without obstructing the incident of the ion beam 1b.
|
