PRODUCTION OF HIGH POLYMER OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a high polymer optical waveguide usable for a waveguide type optical parts such as an optical integrated circuit. SOLUTION: In manufacturing the high polymer optical waveguide which has a core part made of a high polymer material and a clad part surrounding the core part and made of a high polymer material having lower refractive index than that of the core part, a lower clad 2 and a core layer 3 are successively formed on a substrate 1, a plating nucleus 4 is formed on the core layer 3 by an electroless copper plating and a copper mask pattern for etching the plating nucleus 4 is formed of a photoresist 5. Then, etching by a photolithography is executed by using copper 6 deposited by plating as a mask to form a core ledge part 7 and the high polymer optical waveguide is manufactured by covering the whole parts with an upper clad 8.