发明名称 COMPOSITION CURABLE WITH VISIBLE LIGHT LASER
摘要 PROBLEM TO BE SOLVED: To obtain a compsn. having high sensitivity to visible light laser, capable of high-speed scanning exposure with the laser and giving a very fine high resolution image by incorporating a combination of a coumarin dye having a specified structure with a titanocene compd. into a photosetting resin having photosensitive groups which can be crosslinked or polymerized when irradiated with light. SOLUTION: This compsn. contains a photosetting resin having photosensitive groups which can be crosslinked or polymerized when irradiated with light, a sensitizer represented by formula I or II and a titanocene compd. represented by formula III. In the formulae I, II, each of R1 -R7 is 1-3C alkyl. In the formula III, each of two R8 's is optionally substd. cyclopentadienyl, the substituent is 1-2 methyl groups and each of R9 and R10 is a group represented by formula IV (where R11 is F, -CF3 or -CF2 CH3 and each of R12 -R15 is F, -CF3 , etc.).
申请公布号 JPH10142790(A) 申请公布日期 1998.05.29
申请号 JP19970218283 申请日期 1997.07.30
申请人 KANSAI PAINT CO LTD 发明人 IMAI GENJI;KOGURE HIDEO
分类号 G03F7/004;C08F2/50;G03F7/027;G03F7/029;G03F7/031;G03F7/038;H01L21/027;(IPC1-7):G03F7/031 主分类号 G03F7/004
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