发明名称 Cascade scanning optical system
摘要 A cascade scanning optical system which includes a plurality of laser scanning optical systems each emitting a laser beam to scan a surface of a member, and a beam splitter positioned in an optical path between the plurality of laser scanning optical systems and the member such that a first laser beam which has passed through the beam splitter and a second laser beam which has been reflected by the beam splitter proceed to the surface on a common line thereon in respective ranges of the common line. Each of the plurality of laser scanning optical systems is desinged as a telecentric system.
申请公布号 US5867299(A) 申请公布日期 1999.02.02
申请号 US19970917475 申请日期 1997.08.26
申请人 ASAHI KOGAKU KOGYO KABUSHIKI KAISHA 发明人 TAKANO, MASATOSHI;TAKASUGI, EIJI;KIKUCHI, SHINJI;SATO, TSUTOMU;SAITO, HIROYUKI;ARAKI, YOSHIYUKI;IIMA, MITSUNORI;SASAKI, TAKASHI;IIZUKA, TAKASHI
分类号 B41J2/44;G02B26/10;G02B26/12;H04N1/113;H04N1/12;H04N1/192;(IPC1-7):G02B26/08 主分类号 B41J2/44
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