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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH11251283(A)
申请公布日期
1999.09.17
申请号
JP19980046775
申请日期
1998.02.27
申请人
SONY CORP
发明人
KOKUBU KATSUNORI
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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