| 摘要 |
PROBLEM TO BE SOLVED: To improve the inspection efficiency of a liquid crystal substrate by providing a first probe block for disconnection/shorting inspection (OS inspection), a second probe block for TEG inspection and a Z driving mechanism. SOLUTION: In an X mobile object 62, a first probe block for OS inspection 72 and a second probe block for TEG inspection 74 are assembled in the lowermost part of a U form part in a Y direction at an interval by Z driving mechanisms 76 and 78. At the time of OS-inspecting a liquid crystal substrate, the first probe block 72 is lowered to a position where a probe 80 is brought into contact with an electrode by the Z driving mechanism 76 and a probe 82 is raised to a position which is not brought into contact with the liquid crystal substrate by the Z driving mechanism 78. At the time of TEG-inspecting the liquid crystal substrate, the second probe block 74 is lowered to a position where the probe 82 is brought into contact with the electrode by he Z driving mechanism 78. The first probe block 72 is raised to the position where the probe 80 is not brought into contact with the liquid crystal substrate by the Z driving mechanism 76.
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