| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chuck assembly which enables an object to be displaced only in a specified direction, generates only a presumable displacement in the object even though the object is exerted by external force generated by the accelerated motion of the structural part holding the object or the thermal expansion and contraction of the structural part, and enables a correction of the displacement, and to provide a method of chucking. SOLUTION: In a chuck assembly, when a reticle is held, the reticle is held in such a state that the reticle can be displaced and deformed in a specified direction. To be concrete, the reticle is held so that the reticle can be displaced only in the in-surface direction of the chuck assembly. In particular, the center of holding of the reticle is made invariable.</p> |
